3M氟化液FC-3283是无色透明全氟化学品,具有良好的化学惰性、电气绝缘性能、热传导性和的第表面张力应用于半导体制造厂作为热传导介质。其液体温度范围为-50°C 至128°C,主要应用于蚀刻设备、离子注入设备、测试设备及其他设备。因为FC-3283是单一组分,所以其成分不好出现降解或者过期。FC-3283沸点高,其随时间的挥发也比较少。
3M Fluorinert Electronic Liquid FC-3283 is a clear, colorless, thermally stable,fully-?uorinated liquid ideal for use in many single phase heat transfer applications in the semiconductor manufacturing industry. Its liquid range (-50°C to 128°C) makes it ideal for a variety of applications such as etchers, ion implanters, testers and others. Because Fluorinert liquid FC-3283 is primarily a single compound, its composition will not shift or fractionate with time. This keeps ?uid loss to a minimum and insures that transport properties will not change with time.