真空机器人(真空模组),可以在10-7Pa的真空环境下运行,耐温达200℃,真空机器人的设计首要考虑机构
和材料。此系列产品大部分组件采用不锈钢加工或热膨胀系数相当的并且出气率低的材料。此系列产品主要应用
于真空室、高温室、高洁净度环境。
Vacuum linear module is able to work in 10-7Pa vacuum environments and heat resistance up to 200
℃,structure and material is the primary consideration while designing. The stainless steel is applied mostly,as
well as the equal thermal expansion coefficient and low out-gassing material. This series of product is mainly
used in vacuum,high temperature and high cleanliness environments.