此系列产品为微镜阵列,即采用微光机电光束偏转镜组成的镜面整列。适用波长可从深紫外至近红外(DUV to NIR, 193nm~1500nm)。镜面可由256×256个微镜面组成,每个镜面为16um*16um。扫描频率可达1KHz。可用做图形的产生,可编程掩膜板等。
Example of micro mirror array for extended spectral range
256 x 256 micro mirrors
16 μm x 16 μm mirror pitch
Frame rate 1 kHz
Analogue mirror tilting
Illumination wavelengths : 193 … 1500 nm
Applications
Pattern projection (real time grey levels)
Programmable masks
Structured / programmable illumination