产品品牌：SEW
产品型号：MDV60A0110-***3-4-00
基于M－Z干涉仪的压力传感器的关键制作工艺是在硅片上做出干涉仪结构和力敏薄膜。干涉仪结构是先把硅的氮化物沉积在硅片上，再通过光刻确定其基本形状，***用刻蚀法得到的。而力敏薄膜则是先在硅片上沉积SiO2，再用光刻法确定出薄膜的基本形状，最终用各向异性腐蚀法获得的。
厦门岳航计算机工程有限公司
contact: 张芳
Tel: +86-0592-5087951 +86-18030132582
Fax: +86-0592-5165561（传真备注张芳收，谢谢！）
QQ: 2946362425 2825149620
mail:2946362425@qq.com
网址：/
地址：厦门市思明区湖滨东路湖光大厦8楼B
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