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DC-10和DC-20是10kW及20kW输出功率的溅射用DC電源。它由可靠的部件和电路组成。 特点 轻量・省空间 输出电压范围可选 丰富的电弧处理 不需要冷却水 可以安装高速电弧中断回路 自由的并联操作功能 用途 FPD用溅射设备 半导体用溅射设备 触摸屏用溅射设备用 工业涂层用溅射设备 规格
它是等离子体负载的可靠电源，其设计反映了包括电源应用在内的多年积累的专业知识。
轻量・省空间的设计，安装简易
除800V规格外，还提供1000V规格。
丰富的电弧控制系统。
强制空冷系统，不需要冷却水。
实现标准的低电弧能量。 此外，可以安装可选的高速电弧中断电路。
DC-10，DC-20：可选的并联运行功能允许自由组合10kW和20kW，并联运行多达12个单元。 （240千瓦）Model DC-10-AM DC-10-H-AM DC-10-4-AM DC-20-AM DC-20-H-AM DC-20-4-AM Input specification Rated input voltage 3-Phase 187 to 229VAC 3-Phase AC342 to 440V 3-Phase 187 to 229VAC 3-Phase AC342 to 440V Input capacity 13.5kVA or less 25kVA or less Output specification Maximum rated power 10kW 20kW Rated current 2*** 18A 2*** 50A 40A 50A Rated voltage -800V -1000V -800V -800V -1000V -800V Ignition voltage -1500V Abnormal discharge control Shutoff by inverter stop or high-speed arc shutoff circuit*1 when abnormal discharge is detected Control Control method Constant power control (P control)/constant current control (I control)/constant voltage control (V control) Control precision Constant power control (P Control)：±0.5% or less of the rated output or ±1％ of the set value, whichever is larger.
Constant current control (I Control)：±1％ or less of the rated output or ±2％ of the set value, whichever is larger.
Constant voltage control (V Control)：±1％ or less of the rated output or ±2％ of the set value, whichever is larger.Control warranty scope Constant power control, 10 to 100％ of rated power value Extenal interface analog/digital,RS-232C or 485 Parallel operation Up to 12units can be controlled by master/slave communication Cooling method Forced air-cooling Dimension W×D×H 483×630×133mm (excluding protrusions) Weight 29kg 36kg Applicable standard CE/ SEMI F47/ RoHS
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