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RFS-N系列是输出频率13.56MHz、功率0.5kW/1/kW/3kW/5kW的等离子工艺用RF电源。 装载高效率RF放大器实现了小型·轻量化。 特点 高效率 快速自动匹配 RF电源内置自动匹配功能 灵活的控制 可靠性高 用途 溅射设备 CVD设备 等离子蚀刻设备 RF离子源 中和剂 规格 [Power generator] [Matching box] * Operating ambient temperature 10 to 40℃ (non condensing)
另外，RF电源内置自动匹配控制器功能，仅从主机单元就可以对RF电源进行电力控制及匹配系统控制。
配有高功率转换效率的RF电路以节省能量。
快速算法实现快速自动匹配。
只有主机才能进行匹配系统控制。
可通过内置控制器手动控制RF电源和匹配器
外部模拟控制，可实现串联通信控制。
对作为设备制造商所积累的设计经验。Model RFS-1305N RFS-1310N RFS-1330N RFS-1350N Input Spec Input rated voltage AC200 to 220V Input voltage fluctuation range AC180～242V Phase, frequency 1phase 50/60Hz 3phase 50/60Hz Input connector Bayonet netlock round connector
DCA3102E16-10P-DBayonet netlock round connector
DCA3102E22-22P-DInput capacity 1.2 kVA or less 1.8 kVA or less 5 kVA以 or less 8 kVA or less Input current 10A or less 2*** or less 30A or less Leak current 5mA or less Output Spec Oscillating frequency 13.56MHz Rated traveling-wave power 500W（50Ω load） 1000W（50Ω load） 3000W（50Ω load） 5000W（50Ω load） Maximum reflected wave power 100W 500W Output impedance 50Ω Harmonic distortion ratio -35dB or less (Rated output, Continuous mode) Output connector N type HN type DIN 7/16 Cont Control method Power control mode Control precision Rated output ±2％ or less（Rated power 10～100％） Cooling method Air-cooling Water-cooling No cooling water required Flow rate 4L/min Flow rate 6L/min Control guarantee range Rated power 10 to 100％ Demensions W x D x H 240mm x 495mm x 150mm
（excepting projection portion)480mm × 500mm × 150mm
（excepting projection portion)Weight 11kg 23kg Model MBX-1305N MBX-1310N MBX-1330N MBX-1350N RF input Input frequency 13.56MHz Rated power 30～500W 30～1000W 30～3000W 50～5000W Input connector N type HN type DIN 7/16 type RF output Allowable output voltage 2.5kVpp or less / 2.5kVdc or less 5.0kVpp or less / 2.5kVdc or less 10kVpp or less / 2.5kVdc or less Allowable output current 30A or less 80A or less 120A or less Load impedance Real part： 0.5Ω ≦ R ≦ 10.0Ω
（Only the range of regulation voltage and current）Residual reflected wave power Big either input travelling wave power 0.3％ or less or 10W or less Big either input travelling wave power 0.3％ or less or 30W or less Big either input travelling wave power 0.3％ or less or 50W or less Cooling system Air-cooling Air-cooling + Water-cooling （Flow rate 2L/min） Demensions W x D x H 375mm x 250mm x 120mm（excepting projection portion） 375mm x 250mm x 170mm
（excepting projection portion）450mm x 500mm x 248mm
（excepting projection portion）Weight Approx. 8kg Approx. 10kg Approx. 21kg
* Operating environment, direct sunlight, heat、dust, avoid a vibration, do not contain corrosive gas
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