多级罗茨型干泵
LR 系列
LR3601-T(TT)
ULVAC
干泵LR系列,根据的高温均热化技术,有效利用压缩热,实现了在CVD,蚀刻等硬工艺中的高耐久性。在轻工艺中,与ECO-SHOCK的组合多可节省约80%的电力。 另外,提高了维护性和降低了噪音,全部型号CE对应可能(可选)。关于ECO-SHOCK的详细信息,请参考关联信息。
特点
LR系列:低温领域
不单是惰性气体,还特别适用于装载和卸载室中的排气,缩短排气时间以增加产量。
HR系列/UR系列:高温领域
CVD,蚀刻等产生的可升华的废气物质可以在气体状态下排出。
1000毫秒内瞬时中断。
符合CE标志(可选)。
用途
活性气体(CVD、干刻等)
惰性气体(溅射,蒸发,热处理等)
放入取出室排气时间缩短(LR系列)
产生粉尘的工艺的排气(Si单晶体上升等)
作为辅助排气泵(涡轮分子泵、机械增压泵的辅助排气)
规格
Model | LR1800 | UR1800 | LR3601 | LR3601-TT | LR3601-R | LR3601-TR(TTR) | UR3601-TT | |||
Pump | DRP | LR180 | UR180 | LR421 | LR421-T | LR421 | LR421-T | UR421-T | ||
MBP | PRC-018A | PRC-036C | PRC-036C(-T) | PRC-036D | PRC-036D(D-T) | PRC-036C-T | ||||
Max. pumping speed | m3/h | 50Hz | 1701 | 1701 | 3200 | 2700 | ||||
60Hz | 1784 | |||||||||
L/min | 50Hz | 28350 | 28350 | 53333 | 45000 | |||||
60Hz | 29700 | |||||||||
Ultimate pressure | Pa | 0.67 | ||||||||
Max. inlet pressure | Atmospheric pressure * | |||||||||
Max. exhaust pressure | 1.0 to Atmospheric pressure | |||||||||
Inlet diameter (type CE) | VG150(KF100) | VG150 | ||||||||
Outlet diameter | KF40 | KF50 | ||||||||
DRP: Rotor blade surface treatment | ○ | ○ | ○ | ○ | ○ | ○ | ○ | |||
MBP: Rotor blade surface treatment | ○ * | ○ | × | T:× TT:○ | × | TR:× TTR:○ | ○ | |||
Weight | kg | 553 | 660 | 720 | 660 | 720 | 720 | |||
Power | Three phase | VAC(Hz) | 200(50/60),220(60) | 180~240/380~440(50/60) | ||||||
Current | At ultimate pressure | A | 21.4 | 29.2 | 31 | 35.4 | 39.8 | |||
At max. load | A | 39.8 | 34.9 | 58.4 | 82 | 68.3 | ||||
Cooling water Supply pressure | MPa | 0.1 to 0.3 | 0.2 to 0.5 | |||||||
Cooling water In/Out differrencepressure | MPa | >0.1 | >0.2 | |||||||
Cooling water Flow rate | L/min | >5.0 | >4.0 | >5.0 | ||||||
N2 gas | Supply pressure | MPa | 0.1 ~ 0.5 | |||||||
Regula- ted pressure | MPa | 0.05 ~ 0.1 | ||||||||
N2 purge | Shaft purge | SLM | 5 | |||||||
Gas ballast | SLM | 0~45 | 0~195 | None *1 | 0~45 | None *1 | 0~45 | 0~195 |
*Please specify voltage at the time of ordering.
*LR pump designed for low operating temperature of the pump body. The HR is for high temperature pump body operation. While the UR series is for Ultra High pump body temperature.
*The HR300, HR600, HR1200,UR600,UR1200,UR1800 and UR3601-TT models should all be operated below 200Pa (1.5 Torr).
*The LR3601-R/TR/TTR is an improved exhaust performance model in the high-pressure area.
* 〇=with ×=with out
* MBP of LR300, LR600, LR1200, LR1800, can choose the existence of a surface treatment.
* Additionally, a pump with gasballast use is possible to quote. Please contact us for the selection and quotation.
■Silencer (Option)
Model | Material | Surface treatment | Weight (kg) | Flange Connection |
RS-01 | SUS304 | GBB treatment | 4.1 | NW40 |
RS-02 | SUS304 | GBB treatment | 8.3 | NW40 |
RS-03 | SUS304 | Polished plate | 12.5 | NW50 |
■Acceptable Table
Kit type | Agreement | Clamp | Outer ring | Connection Flange | Stay |
RS-01 kitA | LR60,LR90,LR300 | 1 | 1 | - | - |
RS-01 kitB | LR600,LR1200 | 2 | 2 | 1 | 1 |
RS-02 kitA | LR180(LR60,LR90,LR300) | 2 | 2 | 1 | 1 |
RS-02 kitB | LR1800(LR600,LR1200) | 2 | 2 | 1 | 1 |
RS-03 kitA | LR421(-T) | 1 | 1 | 1 | 1 |
RS-03 kitB | LR3601(-T/TT/R/TR/TTR) | 3 | 3 | 1 | 1 |