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High Performance & High ReliabilityImproved Zero point StabilityInput/Output SignalAnalog/RS-485, DeviceNet™ and EtherCAT (future)Response time<1sec for any given set pointProgressive PIDSeal MaterialsBoth Metal Seal and Elastomer Seal are availableSpecification
| Model Number | FCST1005（M）F/TM1005（M）F FCST1005（M）FD/TM1005（M）FD | FCST1030（M）F/TM1030（M）F FCST1030（M）FD/TM1030（M）FD | FCST1050（M）F/TM1050（M）F FCST1050（M）FD/TM1050（M）FD |
|---|---|---|---|
| Flow Range (N2 Equivalent) | 10,20,30,50, 100,200,300,500SCCM 1,2,3,5SLM | 10,20,30SLM | 40,50SLM |
| Valve Type | N/O: Normally Open, N/C: Normally Closed | ||
| Controlled Volume Range | 2%～***F.S. | ||
| Flow Accuracy | ±1% F.S. (Accuracy guaranteed between 15 ~ 35ºC) | ||
| Setting Signal | 0.1 ~ 5VDC | ||
| Output Signal | 0 ~ 5VDC | ||
| Repeatability | ±0.2%F.S. | ||
| Response Time | ≤1sec | ||
| Required Pressure Difference | 50 ~ 300kPa | NO 50 ~ 300kPa (6SLM ~ 10SLM) ***00 ~ 300kPa (11SLM ~ 20SLM) NC 150 ~ 300kPa (21SLM ~ 30SLM) NC 50 ~ 300kPa ( 6SLM ~ 10SLM) NC 100 ~ 300kPa (11SLM ~ 30SLM) | 200 ~ 300kPa |
| MAX Operating Pressure | 400kPaG | ||
| Proof Pressure | 1MPaG | ||
| Guaranteed Operating Temperature Range | 5 ~ 50℃ | ||
| External Leak Rate | Metal Seal： 1×10-11Paㆍm3/sec He、Elastomer Seal： 1×10-7Paㆍm3/sec He | ||
| Mounting Orientation | Can be mounted in any orientation | ||
| Current Consumption | T1000F +15VDC：50mA、-15VDC：200mA T1000FD +11 ~ +24VDC、5.5VA (5.5W) | ||
| Communication | Analog 0 ~ 5V DC, Digital: RS485 (Fujikin Protocol), DeviceNetTM | ||
| Wetted Surface Material | 316L SS, Magnetic Stainless Steel, PTFE | ||
| Seal Material | Metal Seal: SUS316L, Elastomer Seal: Fluoro-Rubber (Chloroprene Rubber) | ||
| Actuator Type | Solenoid actuator | ||
| Surface Finish | None (Option: EP) | ||
| Fittings | 1/4” UJR, 1/4” F900, 1/4” 1.5 Wseal®, 1/4” 1.125 Wseal®, 1/4” 1.125 Cseal | ||
| Digital Communication | RS-485, Standard transmission rate 38400bps, Maximum connected units 127 | ||
※This specification is for MFC.*1 At Fujikin, flow rates (SCCM, SLM) are converted to values at 0ºC, 101.3kPa abs (1atm) for calibration.*2 Reference temperature for temperature coefficient is 25ºC.*3 Response time on SPEC sheet is the time to reach from minimum flow rate to ±2%F.S of setting flow rate.
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