气体分析仪专用软件
气体分析仪专用软件
Qulee QCS Ver.4.0
ULVAC
" Qulee QCS "软件对应ULVAC的气体分析仪/工艺气体监控器
本软件,对应几乎所有的ULVAC制的气体分析仪,简单的点击操作,谁都可以测量和保存数据。
特点
Qulee的标准软件(Windows 7/8/10 )
Qulee QCS Ver.4.0
操作简单
丰富的快捷按钮,操作轻松
测量模式改进
扫描模式,趋势模式,模拟模式,灵敏度校准模式等
氦检漏仪机能加强
氦检漏测试模式可以轻松进行泄漏检查
可以显示气体成分的名称
在扫描/趋势模式下可显示气体成分的名称
Recipe设置
通过Recipe设置可实现测量条件管理功能
可以连接16个单位
Ethernet通信最多同时控制16个单元
各种处理机能的加强
Data结合功能
后台处理功能
测量区域的集成处理功能
离子源和二次电子倍增器的预防性维护管理功能
分析管的可追溯性管理功能(***号5016031)
在2点同时记录模拟数据
分压设***输出2个设定(趋势模式测量)
Password lock功能
CSV格式的数据导出功能
使用电子表格软件,以可读数据格式(CSV格式)导出
规格
Model | Qulee QCS Ver. 4.0 |
OS | Microsoft® Windows 7/8/10 (32bit,64bit) |
Interface | Ethernet |
Sensor Number | Up to 16 units (with Ethernet) |
Sensor model | Qulee BGM2/Qulee CGM2/QuleeHGM2/Qulee RGM2 |
Recipe | 100 (70 in the user area) |
Sweep speed | 50, 100, 200, 500, 1000, 2000 msec/mass |
Sampling interval | Auto,0.5 to 1000 sec (in the trend mode), 1 to 1000 sec (in the scan mode) |
Measurement end time | Continuous,or free setting |
Measurement mode | Scan mode: Measuring the mass spectrum in various mass range (model dependent) |
Trend mode: Measuring partial presuure to time up to 20 channels | |
Leak-test mode: One-touch helium leak testing | |
Analog mode: Analog wave measurement for mass number calibration | |
Sensitivity-calibration mode:Calibration of the sensitivity of the SEM detector | |
DEGAS mode: Controlling the electron bombardment type outgassing of ionsource (except RGM) | |
Indication og gas compositon name | Able to indicate the gas composition name in scan and trend mode function |
Function | Background subtraction / integration of mesured area / Able to combine data / Able to lock Password |
Analog Input | 0 to 10V (2 points) |
Set-point | Partial pressure set-points in 2 channels (Error and warning) (only in trend mode) |
Electron energy for ionization | Fixed (HGM2 25 to 70eV / RGM2 20 to 70eV) |
Status Check | Error detection (communication error, filament break, RF error, interlock) Total running time of Filament and SEM |
Display | Vertial axis: Horizontal axis:Mass number (scan mode and analog mode)and time (trend mode). Able to change and scroll the Horizonal axis range.Indicate saved data(able to indicate saved data during measurement) Bar chart and line chart is simultaneously indicated. |
Data save | Auto save,or saved after mesurement |
The file is named by combination of time and date at strting point of mesurement. (Auto save) | |
Filename is selectable.Saving place can be set | |
File can be converted to CSV format (for Past Data) | |
Print data | Graph displayd in scan,trend or analog mode can be prnted |
Setting screen range to be printed / Setting data color & radius of trend graph | |
Option | Host communication facilities: |
・Mesurement data of trendy mode can be transmitted through RS232C commucation by a demand fron host computer. | |
Analog Output: | |
・During the trendy mode mesurement, an analog og the nuclear number data which appointed every mesurement interval is performed. | |
Recommendation of PC | Ethernet port,CD-ROM drive,HDD:8MB (except mesurement data).RAM:4GB or more. CPU:Corei5 or higher.(8 units or more/Corei7 or higher). Display are:1280×1024 or more |