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富士金气体质量流量计T1000系列
具有高精度、快速响应、价格低廉、零漂低等特点。不仅满足半导体、微电子、玻璃镀膜、阳能电池等行业，还可以满足钢厂、电厂、石化等行业的要求
规格参数
1. 多气体多量程（MG/MR）功能
2. 可在客户端简单打盾进行气体种类/流量变更，从10sccm至50slm
3. 准确度高：±1%S.P.（100-25%），±0.25%F.S.(25%-2%)(精度***范围15-35℃)
4. 再现性：±0.2% F.S
5. 强耐腐蚀性
6. 输入输出信号:模拟（0-5VDC）/RS-485、Device Net
7. 全量程范围、响应速度快，≤1sec
8. 密封材质：金属密封/橡胶密封
9. 阀门种类：NO常开NC常闭型
10. 动作压力：400kPaG(Ar:500kPaG)
11. 耐压：1MPa
12. 使用温度：5-50℃
13. 金属密封外部泄漏率：1 x 10 -11 Pa&﹟8226;m3/sec He
14. 橡胶密封外部泄漏率：1 x 10 -7 Pa&﹟8226;m3/sec He
15. 材质：SS316L不锈钢
16. 接口方式：1/4vcr金属面密封连接，卡套连接
| Model Number | FCST1005（M）F/TM1005（M）F FCST1005（M）FD/TM1005（M）FD | FCST1030（M）F/TM1030（M）F FCST1030（M）FD/TM1030（M）FD | FCST1050（M）F/TM1050（M）F FCST1050（M）FD/TM1050（M）FD |
|---|---|---|---|
| Flow Range (N2 Equivalent) | 10,20,30,50, 100,200,300,500SCCM 1,2,3,5SLM | 10,20,30SLM | 40,50SLM |
| Valve Type | N/O: Normally Open, N/C: Normally Closed | ||
| Controlled Volume Range | 2%～***F.S. | ||
| Flow Accuracy | ±1% F.S. (Accuracy guaranteed between 15 ~ 35ºC) | ||
| Setting Signal | 0.1 ~ 5VDC | ||
| Output Signal | 0 ~ 5VDC | ||
| Repeatability | ±0.2%F.S. | ||
| Response Time | ≤1sec | ||
| Required Pressure Difference | 50 ~ 300kPa | NO 50 ~ 300kPa (6SLM ~ 10SLM) ***00 ~ 300kPa (11SLM ~ 20SLM) NC 150 ~ 300kPa (21SLM ~ 30SLM) NC 50 ~ 300kPa ( 6SLM ~ 10SLM) NC 100 ~ 300kPa (11SLM ~ 30SLM) | 200 ~ 300kPa |
| MAX Operating Pressure | 400kPaG | ||
| Proof Pressure | 1MPaG | ||
| Guaranteed Operating Temperature Range | 5 ~ 50℃ | ||
| External Leak Rate | Metal Seal： 1×10-11Paㆍm3/sec He、Elastomer Seal： 1×10-7Paㆍm3/sec He | ||
| Mounting Orientation | Can be mounted in any orientation | ||
| Current Consumption | T1000F +15VDC：50mA、-15VDC：200mA T1000FD +11 ~ +24VDC、5.5VA (5.5W) | ||
| Communication | Analog 0 ~ 5V DC, Digital: RS485 (Fujikin Protocol), DeviceNetTM | ||
| Wetted Surface Material | 316L SS, Magnetic Stainless Steel, PTFE | ||
| Seal Material | Metal Seal: SUS316L, Elastomer Seal: Fluoro-Rubber (Chloroprene Rubber) | ||
| Actuator Type | Solenoid actuator | ||
| Surface Finish | None (Option: EP) | ||
| Fittings | 1/4” UJR, 1/4” F900, 1/4” 1.5 Wseal®, 1/4” 1.125 Wseal®, 1/4” 1.125 Cseal | ||
| Digital Communication | RS-485, Standard transmission rate 38400bps, Maximum connected units 127 | ||
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