高性能工艺
Qulee HGM2 系列
HGM2-202
ULVAC
带有差动排气系统的四极质谱仪( Q u l e e w i t h Y T P - H )是ULVAC结合Q u l e e的丰富实际成果和顾客的需求开发的,实现了功能的充实和使用的简易。
多种真空设备的工艺管理,残留气体分析到R&D都可广泛应用。
特点
***的性价比 通过差分排气系统,可以在1台设备上实现从过程监控到残余气体分析(RGA)
紧凑的设计 采用标准排气装置Desktop YTP的紧凑型设计
显示部分一体化的设计 无需电脑也可进行测量
操作简单 - One Click机能(对每个人来说都很容易,不需要复杂的操作)
可以进行大气压分析 包括大气压分析在内,还有监测3000Pa,500Pa,100Pa,10Pa和1Pa的规格
可根据应用选择型号 质量数1 ~ 100(BGM2-101/102)、1 ~ 200(BGM2-201/202)、 1 ~ 300(HGM2-302)
低噪音: 运行时43dB(A)以下
无需真空计专用显示器:真空计信号可以在操作屏上显示(真空计可选)
完整的检漏功能 可以进行氦气检漏和漏气测试
Qulee可对应Ethernet 标准配有QCS(Ver.4) 软件(Windows 7/8/10)
用途
研究开发用途的各种气体分析
溅射设备、真空蒸发设备等工艺中的气体监测
溅射设备、真空蒸发设备等的残留气体分析
高真空排气设备的残留气体分析
真空渗碳炉末端和氧浓度的确认
冷冻干燥设备的干燥点和杂质的确认
Specifications
Model | HGM2-202 | HGM2-302 | ||
Mass filter type | Quadrupole | |||
Mass range | 1 ~ 200 amu | 1 ~ 300 amu | ||
Resolution | M/ ΔM=1M(10% P.H.) | |||
Detector type | Faraday cup | SEM | Faraday cup | SEM |
Sensitivity | 2.5×10⁻⁶ A/Pa | 4 A/Pa | 2.0×10⁻⁶ A/Pa | 4 A/Pa |
3.3×10⁻⁴ A/Torr | 533 A/Torr | 3.3×10⁻⁴ A/Torr | 533 A/Torr | |
2.5×10⁻⁴ A/mbar | 400 A/mbar | 2.5×10⁻⁴ A/mbar | 400 A/mbar | |
Minimum datectable partial pressure | Approx. 10⁻⁹ Pa | Approx. 10-13Pa | Approx. 10⁻⁹ Pa | Approx. 10-13Pa |
Approx. 7.5×10-12 Torr | Approx. 7.5×10-16 Torr | Approx. 7.5×10-12 Torr | Approx. 7.5×10-16 Torr | |
Approx. 1×10-11 mbar | Approx. 1×10-12 mbar | Approx. 1×10-11 mbar | Approx. 1×10-12 mbar | |
Maximum operating pressure | 1×10⁻²Pa | |||
7.5×10⁻³ Torr | ||||
1×10⁻⁴ mbar | ||||
Filament | lr / Y₂O₃, 2pcs | |||
Ionizing voltage | 25 ~ 70 eV(defalut:70eV) | |||
Emission current | 0.1mA/0.5mA/1.0mA(default:0.5mA) | |||
DEGAS | Electron bombard type 330V, 5mA | |||
Total pressure function | Capable / 10⁻² ~ 10⁻⁵Pa | |||
"One Click" function | Capable / He/H₂O/N₂/O₂/Any gas | |||
"One Click" leak test function | Capable | |||
Power input | DC24V±10% 50W | |||
Weight(sensor unit / sensor) | 2.4kg/0.81kg | |||
Maximum sensor operating temperature | 250℃(482℉) | |||
Maximum bakeout temperature (elsectronisc removed) | 300℃(572℉) | |||
Operating temperature range | 10 to 40℃(50 to 104℉) | |||
Operating humigity range | 15 ~ 80%(not condensing) | |||
IP rating | IP30(sensor unit) | |||
Power connector | MSTBV2.5/3-STF-5.08 | |||
Communication interface | Ethernet compatible | |||
External input / output connector | D-sub15-pin (M2.6 screw)(eith option) | |||
Communication connector | RJ45 | |||
External input / output signal | Analog input (0 to 10V)×2,External interlock input (pressure protection)×1,Error output ×1(FIL,SEM,RF,fault),Partial pressure setpoint output ×2(fault,alarm),Total pressure setpoint output ×1 | |||
Software | Qulee QCS Ver.4.0 later (Windows 7/8/10) | |||
Standard accessories | Power connector,Communication cable (3m long),Software (install CD),Instruction manual (CD) | |||
Option accessories (cf. Qulee optional catalogue) | Communication cable (10,15,20,30,50m long), AC power adapter, USB-LAN adapter, Switing hub(8ports or 16ports), Input / output connector, Jacket heater, Carry case | |||
Applicable standard | CE |
※Please prepare an AC/DC power supply or please purchase the AC/DC adapter of an option.