基本工艺
Qulee with YTP-H 系列
Qulee with YTP-H BGM2-201
ULVAC
带有差动排气系统的四极质谱仪( Q u l e e w i t h Y T P - H )是ULVAC结合 Qulee 的丰富实际成果和顾客的需求开发的,实现了功能的充实和使用的简易。
多种真空设备的工艺管理,残留气体分析到R&D都可广泛应用。
特点
***的性价比 通过差分排气系统,可以在1台设备上实现从过程监控到残余气体分析(RGA)
紧凑的设计 采用标准排气装置Desktop YTP的紧凑型设计
显示部分一体化的设计 无需电脑也可进行测量
操作简单 - One Click机能(对每个人来说都很容易,不需要复杂的操作)
可以进行大气压分析 包括大气压分析在内,还有监测3000Pa,500Pa,100Pa,10Pa和1Pa的规格
可根据应用选择型号 质量数1 ~ 100(BGM2-101/102)、1 ~ 200(BGM2-201/202)、 1 ~ 300(HGM2-302)
低噪音: 运行时43dB(A)以下
无需真空计专用显示器:真空计信号可以在操作屏上显示(真空计可选)
完整的检漏功能 可以进行氦气检漏和漏气测试
Qulee可对应Ethernet 标准配有QCS(Ver.4) 软件(Windows 7/8/10)
用途
研究开发用途的各种气体分析
溅射设备、真空蒸发设备等工艺中的气体监测
溅射设备、真空蒸发设备等的残留气体分析
高真空排气设备的残留气体分析
真空渗碳炉末端和氧浓度的确认
冷冻干燥设备的干燥点和杂质的确认
规格
Qulee main body | Select from BGM2-101 / 102 / 201 / 202, HGM2-302 *Refer to the product catalogue for the specification of Qulee | |||
Software Qulee QCS Ver.4.0(Windows 7 / 8 / 10) | ||||
Max sampling pressure | Select from atmospheric pressure 3000Pa / 500Pa / 100Pa / 10Pa / 1Pa | |||
Select from atmospheric pressure 22.5Torr / 3.75Torr / 0.75Torr / 7.5×10-2Torr / 7.5×10-3Torr | ||||
Select from atmospheric pressure 30mbar / 5mbar / 1mbar / 0.1mbar / 1.0×10-2mbar | ||||
*Atmospheric pressure type can be used only under the atomospheric condition *3000 to 1Pa (22.5 to 7.5×10-3Torr,30 to 0.01mbar) types can be used under each pressure | ||||
Specification pressure | Vacuum type | Gas introduction type (3000Pa ~1Pa type) | Manual bellows valve (2 systems: orifice line / direct line) Mating flange / ICF070 | |
Variable leak valve type | Sampling pressure | Power-supply voltage | AC100-240V | |
Atmospheric pressure type (Atmospheric pressure sampling unit) APS-001 | Capillary type (100,000Pa type) | Dry pump(Sweep) | 6L/min, Ultimate pressure/6700Pa | |
Controller unit | Temperature contol and On/Off control of cartridge heater, On/Off control of sweep pump | |||
Capillary tube unit | Manual bellows valve (1 line), Cartridge heater, insulation mat, Capillary tube (already mounted), Joint fitting 1/4 ”Swagelok | |||
Power-supply voltage | Select for AC100V/220V | |||
Pump unit desktop YTP | Desktop YTP (YTP70A-D) | Turbo molecular pump | 70L/s (N2) | |
Dry pump(Roughing) | 19L/min(Diaphragm pump) | |||
Power-supply voltage | AC100-240V | |||
Accessories | AC100V power cord(*1), Base stage for DesktopYTP(*2), AC adapter for Qulee, LAN cable(3m) for Qulee, Software installation disc, Bolt set for fixing flange, Gasket (UFC114G,UFC070G), Power strip(*3), Casters(*4), Various fixing screws | |||
Options | Ionization gauge package(SH2-1,Sensor head cable 2m, Cross tube, Bolts,Gaskets), USB-LAN adapter, Switching hub(8 ports or 16 ports)(*5),Floor cart(*6) |
*1 Please use power code when using the device in a foreign country or a region where the electrical voltage differs from AC100V. Three power codes are necessary for atomospheric pressure sampling unit, desktop YTP, and AC adapter for Qulee.
*2 Make sure to use a base stage when installing desktop YTP. For atmospheric pressure type, it has two-stage structure so that a control unit can be attached.
*3 Power strip only comes with atmosperic pressure/AC100V type.
*4 Casters only come with atmospheric pressure type. Please attatch casters by yourself.
*5 AC adapter is necessary for an optional switching hub.
*6 Please set up the floor cart by yourself.
*7 Desktop YTP, Qulee main body, gas inlet, and other parts will be packaged separately. Please refer to the assembly manual for set up.